Deposition of TiN/a-C superhard nanocomposite coatings

Barshilia, Harish C and Rajam, KS (2004) Deposition of TiN/a-C superhard nanocomposite coatings. Journal of Electrochemical Society of India, 53. p. 95.

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Superhard nanocomposite coatings of TiN/a-C were prepared on silicon (111) and M3 tool steel substrates using a reactive DC magnetron sputtering process. The nanocomposite coatings were prepared at various a-C and TiN layer thicknesses. Structural characterization of the coatings was done by X-ray diffraction (XRD). The nanocomposite coatings exhibited a broad (111) reflection of cubic TiN phase in the XRD. Nanoindentation data showed that ~1.5 m thick TiN/a-C nanocomposite coatings exhibited a maximum hardness of 5100 kg/mm2 for a-C and TiN layer thicknesses of ~4.5 and 10 Å, respectively. The hardness was dependent on the average crystallite size (A0) of the coatings and at A0 = 90 Å coatings exhibited a maximum hardness.

Item Type: Article
Subjects: CHEMISTRY AND MATERIALS > Composite Materials
Depositing User: Mr N Selvakumar
Date Deposited: 24 Aug 2011 08:00
Last Modified: 24 Aug 2011 08:00

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