MEMS: An Overview

Dutta, Soma and Shubha, V (2009) MEMS: An Overview. Project Report. National Aerospace Laboratories, Bangalore, India.

Full text not available from this repository. (Request a copy)


Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale and function individually or in arrays to generate effects on the macro scale. This report presents an overview of MEMS technology with a special emphasis on piezo MEMS.

Item Type: Monograph (Project Report)
Uncontrolled Keywords: Micro-Electro-Mechanical Systems;MEMS;Integrated circuit
Subjects: AERONAUTICS > Aeronautics (General)
CHEMISTRY AND MATERIALS > Chemistry and Materials (General)
ENGINEERING > Electronics and Electrical Engineering
Depositing User: Ms. Alphones Mary
Date Deposited: 04 Aug 2011 11:00
Last Modified: 04 Aug 2011 11:00

Actions (login required)

View Item View Item