Dutta, Soma and Raja, S and Shashikala, Rajappa (2005) Thermo-Mechanical response of an electrically driven micro-actuator. In: International Conference on MEMS and Semiconductor Nanotechnology , 2005, IIT, Kharagpur, India.
Full text not available from this repository. (Request a copy)Abstract
Thermo-mechanical response of a polysilicon beam structured two hot arm horizontal actuators are investigated under electrical load. This thermo-mechanical device is operated by differential thermal expansion caused by resistive Joule heating to generate thermal expansion and movement. The present research demonstrates a good comprehension of the phenomena during Joule heating process for micro systems and the development of an analytical model and a finite element analysis. Numerically simulated results validate the analytical model at the steady state conditions. This simple device can generate a temperature of 1389K and produce a deflection of the order of 12μm at the level of low operating voltage (10 volts).
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | Semiconductor nanotechnology;Polysilicon;Hot arm actuators |
| Subjects: | AERONAUTICS > Aeronautics (General) ENGINEERING > Mechanical Engineering |
| Depositing User: | Ms. Alphones Mary |
| Date Deposited: | 01 Aug 2011 10:39 |
| Last Modified: | 01 Aug 2011 10:39 |
| URI: | http://nal-ir.nal.res.in/id/eprint/9779 |
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