Sankar, N and Govindarajaswamy, E and Perumal, A and Muthuvel, S (2001) Dwell Control for RF Sputtering. Technical Report. National Aerospace Laboratories, Bangalore, India.
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Abstract
In RF sputtering the substrate has to be held under two targets for predefined interval of time and the process repeated a few hundred to few a thousand times. A PC13; based control system using stepper motor, was designed and tested for this purpose. The user fiiendly software was wntten in Visual Basic. The system is being actively13; used.
| Item Type: | Monograph (Technical Report) |
|---|---|
| Uncontrolled Keywords: | RF sputtering;Target control;PC based control |
| Subjects: | AERONAUTICS > Aircraft Communication & Navigation AERONAUTICS > Aerodynamics |
| Depositing User: | Mrs Neetu Chandra |
| Date Deposited: | 31 May 2006 |
| Last Modified: | 24 May 2010 04:12 |
| URI: | http://nal-ir.nal.res.in/id/eprint/1493 |
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