On the realization of self-sensing piezoelectric MEMS actuators

Tiwari, S and Kumar, R and Menon, P K and Antony Jeyaseelan, A and Dutta, Soma and Pratap, R (2019) On the realization of self-sensing piezoelectric MEMS actuators. In: Proceedings of MARSS 2019: 4th International Conference on Manipulation, Automation, and Robotics at Small Scales, 1-5 July 2019, Helsinki, Finland.

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Three different configurations of self-sensing piezoelectric MEMS actuators are designed, fabricated, and tested with PZT as the active material. A two-port circular diaphragm resonator of radius 1000 μm, a cantilever of length 1000 μm and width-24 μm with two parallel top electrodes, and a four-legged resonator structure with a proof mass of total die size 1.6 mm × 3 mm are fabricated and characterized as self-sensing actuators without any cross-talk compensation. A comparison among the output signals reveals that the cantilever (without etching the PZT in between the two electrodes) and the four-legged resonator perform well as self-sensing actuators, while the two-port diaphragm resonator with large concentric top electrodes suffers from electrical cross-talk. A successful characterization of a self-sensing actuator with the common ground electrode (for cantilever) is being reported for the first time. Deflection values of as low as 1 nm could be easily resolved using the proof-mass resonator. The act of actuation is verified by directly measuring the motion with laser doppler vibrometry which cross-verifies the sensor signal produced by the piezoelectric layer.

Item Type: Conference or Workshop Item (Paper)
Subjects: CHEMISTRY AND MATERIALS > Chemistry and Materials (General)
ENGINEERING > Electronics and Electrical Engineering
ENGINEERING > Mechanical Engineering
Depositing User: Mrs SK Pratibha
Date Deposited: 23 Nov 2021 11:37
Last Modified: 23 Nov 2021 11:37
URI: http://nal-ir.nal.res.in/id/eprint/13404

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