Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings

Barshilia, Harish C and Anjana, Jain and Rajam, KS (2003) Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings. Vacuum, 72. pp. 241-248.

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Nanolayered TiN/CrN multilayer coatings were deposited on silicon substrates using a reactive DC magnetron sputtering process at various modulation wavelengths (Λ), substrate biases (VB) and substrate temperatures (TS). X-ray diffraction (XRD), nanoindentation and atomic force microscopy (AFM) were used to characterize the coatings. The XRD confirmed the formation of superlattice structure at low modulation wavelengths. The maximum hardness of the TiN/CrN multilayers was 3800 kg/mm2 at Λ=80 Å, VB=−150 V and TS=400°C. Thermal stability of TiN, CrN and TiN/CrN multilayer coatings was studied by heating the coatings in air in the temperature range (TA) of 400–800°C. The XRD data revealed that TiN/CrN multilayers retained superlattice structure even up to 700°C and oxides were detected only after TA⩾750°C, whereas for single layer TiN and CrN coatings oxides were detected even at 550°C and 600°C, respectively. Nanoindentation measurements showed that TiN/CrN multilayers retained a hardness of 2800 kg/mm2 upon annealing at 700°C, and this decrease in the hardness was attributed to interdiffusion at the interfaces.

Item Type: Article
Subjects: CHEMISTRY AND MATERIALS > Chemistry and Materials (General)
Depositing User: Dr. Harish C. Barshilia
Date Deposited: 04 Feb 2019 11:23
Last Modified: 04 Feb 2019 11:23

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