Evaluation of elasto-plastic properties of ITO film using combined nanoindentation and finite element approach

Gupta, AK and Porwal, D and Arjun, Dey and Sridhara, N and Mukhopadhyay, AK and Sharma, AK and Barshilia, Harish C (2016) Evaluation of elasto-plastic properties of ITO film using combined nanoindentation and finite element approach. Ceramic International, 42 (1, Par). pp. 1225-1233. ISSN 0272-8842

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Abstract

Here we report for the first time the combined nanoindentation experiments and finite element modeling to investigate the in-depth nanomechanical behaviour of 1.25 μm indium tin oxide (ITO) film. The ITO film is grown on silicon substrate by reactive direct current magnetron sputtering technique. Here, the contributions of both film and substrate are considered in a power law based nonlinear material model. Based on experimental data a detailed study is carried out in the present work to investigate the stress-strain behaviour, the related von-Mises stress and equivalent plastic strain of the ITO film. In addition, the effect of the nanoindentation response of the ITO film on the silicon substrate is also evaluated.

Item Type:	Article
Additional Information:	Copyright to this article belongs to M/s. Elsevier
Uncontrolled Keywords:	Indium tin oxide;Nanoindentation;Finite element model;Elasto-plastic properties;Stress-strain
Subjects:	PHYSICS
Depositing User:	Dr. Harish C. Barshilia
Date Deposited:	28 Sep 2015 03:37
Last Modified:	13 Apr 2016 06:14
URI:	http://nal-ir.nal.res.in/id/eprint/12395

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