Effect of bipolar pulsed voltage on properties of DLC films deposited by inductivity coupled PECVD

Jagannadham, VV and Anandan, C and Divya Rao, RG and Rajam, KS and Raina, Gargi (2012) Effect of bipolar pulsed voltage on properties of DLC films deposited by inductivity coupled PECVD. International Journal of Engineering Research and Applications (IJERA), 2 (4). pp. 2034-2042. ISSN 2248-9622

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Abstract

Diamond-like carbon (DLC) is a metastable form of amorphous carbon having large sp3 bonding. DLC films have unique properties such as high hardness, low-friction, good transparency in IR region, chemical inertness and biocompatibility. To have better performance of the coating one should have proper selection of different parameters for deposition. In the present study, DLC films were deposited on p-type silicon (100) substrates using methane (CH4) and hydrogen (H2) as source gases in an inductively coupled RF plasma CVD system. Bipolar pulsed bias voltage source at 10 KHz frequency used for substrate shows proper DLC film. The DLC films were characterized for surface morphology & roughness, hardness & Young’s modulus, IR absorption and micro-Raman spectroscopy. Deposited DLC film images show that the roughness decreases, hardness & Young’s modulus increases and the Id/Ig ratio decreases with the increase of pulse bipolar bias voltage. Raman result shows that disorder decreases. The correlation plotted between Id/Ig, hardness and roughness.

Item Type: Article
Additional Information: Copyright to this article belongs to M/s. IJERA
Uncontrolled Keywords: Bias;Bombardment;Diamond-like carbon;Microstructure; Nanohardness;Nanoindentation;PECVD
Subjects: AERONAUTICS > Aeronautics (General)
Depositing User: Ms. Alphones Mary
Date Deposited: 08 Apr 2014 08:49
Last Modified: 08 Apr 2014 08:49
URI: http://nal-ir.nal.res.in/id/eprint/11944

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