Deepthi, B (2005) Development of superhard nanocomposite coatings by unbalanced magnetron sputtering process. Technical Report. National Aerospace Laboratories, Bangalore.
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Abstract
This project involves the deposition of superhard nanocomposite coatings of TiN/Si3N4 using unbalanced magnetron sputtering system equipped with ion beam assisted facility. Unbalanced magnetron sputtering combined with pulsed dc power supply is a powerful tool for the deposition of compound thin films. The coatings were deposited on silicon substrates under high vacuum conditions. TiN/Si3N4 films were deposited at different silicon concentrations and bias voltages. X-ray diffraction results confirmed the nanocrystalline nature of the coatings. NHT measurements showed that the nanocomposite coating had high hardness values. The surface morphology of the TiN/Si3N4 coating was studied using AFM.
| Item Type: | Monograph (Technical Report) |
|---|---|
| Uncontrolled Keywords: | Sputtering;Unbalanced magnetron;Ion-assisted deposition;Superhard coatings |
| Subjects: | CHEMISTRY AND MATERIALS > Composite Materials CHEMISTRY AND MATERIALS > Space Processing |
| Depositing User: | Ms Indrani V |
| Date Deposited: | 16 Jan 2009 |
| Last Modified: | 24 May 2010 04:10 |
| URI: | http://nal-ir.nal.res.in/id/eprint/1129 |
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