X-ray diffraction studies of RF magnetron sputtered Cu-Ni superlattices

Barshilia, Harish C and Rajam, KS and Balasingh, C (2000) X-ray diffraction studies of RF magnetron sputtered Cu-Ni superlattices. Technical Report. National Aerospace Laboratories.

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Abstract

Multilayers of Cu/Ni of varying amounts of Cu and Ni with modulation wavelength (Λ) between 60 to 425 Å are grown by RF magnetron sputtering technique. Glancing-angle X-ray diffraction (GAXRD) is used to characterize the films. The effect of modulation wavelength on the Superlattice structure formation is studied. The satellite reflections in XRD data, a characteristic of Superlattice, are observed for 68 Å ≤ Λ ≤ 111 Å. The XRD data are also used to calculate the average lattice spacing, d, along the growth direction and has been found to decrease with Λ. Effect of substrate temperature (Ts), during the deposition, on the superstructure formation is studied. Our studies suggest that a substrate temperature of 150ºC to 250ºC is essential for the appearance of satellite reflections in the XRD data. We also show that Superlattice structure formation not only depends on Λ and Ts but also on the thickness of individual Cu and Ni layers, i.e., on tCu/tNi. Finally, we present annealing studies on Cu/Ni multilayer films grown at room temperature.

Item Type: Proj.Doc/Technical Report (Technical Report)
Subjects: CHEMISTRY AND MATERIALS > Chemistry and Materials (General)
Division/Department: Surface Engineering Division, Surface Engineering Division, Materials Science Division
Depositing User: Dr. Harish C. Barshilia
Date Deposited: 25 Oct 2011 09:42
Last Modified: 25 Oct 2011 09:42
URI: http://nal-ir.nal.res.in/id/eprint/9977

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