Design and development of a fully automated substrate rotation system (dwell time controller) for the deposition of multilayer coatings

Barshilia, Harish C and Rajam, KS and Sudhakar, A and Sankar, N (2001) Design and development of a fully automated substrate rotation system (dwell time controller) for the deposition of multilayer coatings. Technical Report. National Aerospace Laboratories, National Aerospace Laboratories.

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Abstract

In the deposition of multilayer coatings (say of A and B materials) thicknesses of individual layers are of the order of few angstroms. The thicknesses of the individual layers are determined by dwell time of substrate underneath each target. Typically the dwell time is of the order of few seconds depending upon the process conditions. Manual control of accurate dwell time is very difficult. More so, the repeatability of the individual layer thicknesses greatly affects properties of the multilayer coatings. In order to deposit multilayer coatings with controlled layer thicknesses and repeatability a PC based control system is designed and tested. This system consists of a driver circuit power supply and a stepper motor connected to the substrate holder through a rotary feedthrough. A user-friendly software is written in Visual Basic and Visual C++ for driving the stepper motor. Keywords: Multilayer Coatings, Magnetron Sputtering, Dwell Time Controller, Visual Basic and Visual C++.

Item Type: Proj.Doc/Technical Report (Technical Report)
Subjects: PHYSICS > Physics(General)
Division/Department: Surface Engineering Division, Surface Engineering Division, Materials Science Division, Aerospace Electronics and Controls Division
Depositing User: Mr N Selvakumar
Date Deposited: 24 Aug 2011 14:32
Last Modified: 24 Aug 2011 14:32
URI: http://nal-ir.nal.res.in/id/eprint/9859

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