Design, modeling and analysis for optimum actuation in Piezoelectric Micro Cantilever

Dutta, Soma (2007) Design, modeling and analysis for optimum actuation in Piezoelectric Micro Cantilever. Project Report. National Aerospace Laboratories, Bangalore, India.

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The present research focuses on the design of MEMS based PZT cantilever for application in active suppression of structural vibrations in micro air vehicles with a long-term goal of development and demonstration. The optimally designed cantilever type piezoelectric microactuator deflects at its tip by converse piezoelectric effect. It consists of a thin film PZT layer, intimately attached with a variable thickness SOI elastic layer and electrically connected with top and bottom electrodes by contact pads. The goal of this coupled piezoelectric actuator design is to multiply the force by adding a support beam, placed closer to the fixed end and by varying the width of the active layer. Structural simulation has been done in ANSYS as well as in COVENTOR to predict the free tip deflection and the blocked force while subjecting the actuator to a prescribed input voltage. The bimorph actuator is 145 m long and 10 m wide. The evolution of the resonant frequency with the cantilever length has been studied.

Item Type: Proj.Doc/Technical Report (Project Report)
Uncontrolled Keywords: Piezoelectric micro cantilever;Bimorph actuator;Optimum actuation
Subjects: AERONAUTICS > Aeronautics (General)
CHEMISTRY AND MATERIALS > Chemistry and Materials (General)
Division/Department: Materials Science Division
Depositing User: Ms. Alphones Mary
Date Deposited: 04 Aug 2011 16:30
Last Modified: 04 Aug 2011 16:30

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