Modelling and Analysis of MEMS Thermal Actuator

Dutta, Soma and Raja, S and Rajappa, S and Medar, MH Modelling and Analysis of MEMS Thermal Actuator. Project Report. National Aerospace Laboratories, Bangalore, India.

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Abstract

This report presents the design and comparative performance evaluation of two hot arm asymmetrical electrothermal micro actuators. Also this report confers detail on a polysilicon thermal actuator designed with two hot arm and one cold arm of different length and width based on asymmetrical thermal expansion of two beams caused by ohmic heating. Because of the interference of the different heat transfer modes (such as conduction, convection, and radiation), the motion simulation becomes complex. This work reveal a good understanding of the phenomena during a Joule heating process for micro-systems and the development of an analytical model and a finite element analysis. Comparisons between analytical and numerical simulation results validate the steady-state conditions.

Item Type: Proj.Doc/Technical Report (Project Report)
Uncontrolled Keywords: Thermal actuator;Electrothermal microactuators;Ohmic heating
Subjects: AERONAUTICS > Aeronautics (General)
ENGINEERING > Structural Mechanics
Division/Department: Materials Science Division, Structures Division, Structures Division, Other
Depositing User: Ms. Alphones Mary
Date Deposited: 04 Aug 2011 16:30
Last Modified: 04 Aug 2011 16:30
URI: http://nal-ir.nal.res.in/id/eprint/9784

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