MEMS: An Overview

Dutta, Soma and Shubha, V (2009) MEMS: An Overview. Project Report. National Aerospace Laboratories, Bangalore, India.

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Abstract

Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale and function individually or in arrays to generate effects on the macro scale. This report presents an overview of MEMS technology with a special emphasis on piezo MEMS.

Item Type: Proj.Doc/Technical Report (Project Report)
Uncontrolled Keywords: Micro-Electro-Mechanical Systems;MEMS;Integrated circuit
Subjects: AERONAUTICS > Aeronautics (General)
CHEMISTRY AND MATERIALS > Chemistry and Materials (General)
ENGINEERING > Electronics and Electrical Engineering
Division/Department: Materials Science Division, Materials Science Division
Depositing User: Ms. Alphones Mary
Date Deposited: 04 Aug 2011 16:30
Last Modified: 04 Aug 2011 16:30
URI: http://nal-ir.nal.res.in/id/eprint/9783

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