Thermo-Mechanical response of an electrically driven micro-actuator

Dutta, Soma and Raja, S and Shashikala, Rajappa (2005) Thermo-Mechanical response of an electrically driven micro-actuator. In: International Conference on MEMS and Semiconductor Nanotechnology , 2005, IIT, Kharagpur, India.

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Abstract

Thermo-mechanical response of a polysilicon beam structured two hot arm horizontal actuators are investigated under electrical load. This thermo-mechanical device is operated by differential thermal expansion caused by resistive Joule heating to generate thermal expansion and movement. The present research demonstrates a good comprehension of the phenomena during Joule heating process for micro systems and the development of an analytical model and a finite element analysis. Numerically simulated results validate the analytical model at the steady state conditions. This simple device can generate a temperature of 1389K and produce a deflection of the order of 12μm at the level of low operating voltage (10 volts).

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Semiconductor nanotechnology;Polysilicon;Hot arm actuators
Subjects: AERONAUTICS > Aeronautics (General)
ENGINEERING > Mechanical Engineering
Division/Department: Materials Science Division, Structures Division, Structures Division
Depositing User: Ms. Alphones Mary
Date Deposited: 01 Aug 2011 16:09
Last Modified: 01 Aug 2011 16:09
URI: http://nal-ir.nal.res.in/id/eprint/9779

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