Sankar, N and Govindarajaswamy, E and Perumal, A and Muthuvel, S (2001) Dwell Control for RF Sputtering. Technical Report. National Aerospace Laboratories, Bangalore, India.
Full text available as:![[img]](http://nal-ir.nal.res.in/style/images/fileicons/application_pdf.png) | PDF Restricted to Archive staff only Download (7Mb) |
Abstract
In RF sputtering the substrate has to be held under two targets for predefined interval of time and the process repeated a few hundred to few a thousand times. A PC13; based control system using stepper motor, was designed and tested for this purpose. The user fiiendly software was wntten in Visual Basic. The system is being actively13; used.
| Item Type: | Proj.Doc/Technical Report (Technical Report) |
|---|---|
| Uncontrolled Keywords: | RF sputtering;Target control;PC based control |
| Subjects: | AERONAUTICS > Aircraft Communication & Navigation AERONAUTICS > Aerodynamics |
| Division/Department: | Aerospace Electronics and Controls Division, Aerospace Electronics and Controls Division, Aerospace Electronics and Controls Division, Aerospace Electronics and Controls Division |
| Depositing User: | Mrs Neetu Chandra |
| Date Deposited: | 31 May 2006 |
| Last Modified: | 24 May 2010 09:42 |
| URI: | http://nal-ir.nal.res.in/id/eprint/1493 |
Actions (login required)
| View Item |
