Dwell Control for RF Sputtering

Sankar, N and Govindarajaswamy, E and Perumal, A and Muthuvel, S (2001) Dwell Control for RF Sputtering. Technical Report. National Aerospace Laboratories, Bangalore, India.

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    Abstract

    In RF sputtering the substrate has to be held under two targets for predefined interval of time and the process repeated a few hundred to few a thousand times. A PC13; based control system using stepper motor, was designed and tested for this purpose. The user fiiendly software was wntten in Visual Basic. The system is being actively13; used.

    Item Type: Proj.Doc/Technical Report (Technical Report)
    Uncontrolled Keywords: RF sputtering;Target control;PC based control
    Subjects: AERONAUTICS > Aircraft Communication & Navigation
    AERONAUTICS > Aerodynamics
    Division/Department: Aerospace Electronics and Controls Division, Aerospace Electronics and Controls Division, Aerospace Electronics and Controls Division, Aerospace Electronics and Controls Division
    Depositing User: Mrs Neetu Chandra
    Date Deposited: 31 May 2006
    Last Modified: 24 May 2010 09:42
    URI: http://nal-ir.nal.res.in/id/eprint/1493

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