Dwell Control for RF Sputtering

Sankar, N and Govindarajaswamy, E and Perumal, A and Muthuvel, S (2001) Dwell Control for RF Sputtering. Technical Report. National Aerospace Laboratories, Bangalore, India.

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Abstract

In RF sputtering the substrate has to be held under two targets for predefined interval of time and the process repeated a few hundred to few a thousand times. A PC13; based control system using stepper motor, was designed and tested for this purpose. The user fiiendly software was wntten in Visual Basic. The system is being actively13; used.

Item Type: Monograph (Technical Report)
Uncontrolled Keywords: RF sputtering;Target control;PC based control
Subjects: AERONAUTICS > Aircraft Communication & Navigation
AERONAUTICS > Aerodynamics
Depositing User: Users 49 not found.
Date Deposited: 31 May 2006
Last Modified: 24 May 2010 04:12
URI: http://nal-ir.nal.res.in/id/eprint/1493

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