A comparative study on the structure and properties of nanolayered TiN/NbN and TiAlN/TiN multilayer coatings prepared by reactive direct current magnetron sputtering

Barshilia, Harish C and Rajam, KS and Anjana, Jain and Gopinadhan, K and Chaudhary, Sujeet (2006) A comparative study on the structure and properties of nanolayered TiN/NbN and TiAlN/TiN multilayer coatings prepared by reactive direct current magnetron sputtering. Thin Solid Films, 503 . pp. 158-166.

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    Abstract

    Nanolayered multilayer coatings of TiN/NbN and TiAlN/TiN were deposited on Si (100) substrates at various modulation wavelengths (i.e.bilayer thickness, K) using a reactive direct current magnetron sputtering system. These coatings were characterized using X-ray diffraction (XRD), X-ray reflectivity, nanoindentation tester and micro-Raman spectroscopy. For TiN/NbN multilayer coatings, at low K, the XRD data showed well-resolved first-order negative satellite reflection along (111) principal reflection, whereas, a weak first-order positive satellite reflection was observed for TiAlN/TiN multilayer coatings. Similarly, the X-ray reflectivity data showed well-resolved satellite reflections of second-orders for TiN/NbN multilayer coatings and diffused satellite reflections for TiAlN/TiN multilayer coatings, indicating broad interfaces for TiAlN/TiN multilayers. TiN/NbN and TiAlN/TiN multilayers showed maximum nanoindentation hardness values of 4000 and 3750 kg/mm 2,respectively. Single layer coatings of TiN, NbN and TiAlN showed hardness values of 2600, 1800 and 3850 kg/mm 2, respectively. The low hardness of TiAlN/TiN multilayers is attributed to diffused interfaces. Raman spectroscopy measurements on the multilayer coatings after heat treatment in air showed that TiN/NbN multilayers were thermally stable (with respect to oxidation) up to 500 -C, whereas TiAlN/TiN multilayers were stable up to 800 -C. The nanoindentation measurements performed on the heat-treated coatings showed that TiN/NbN multilayer hardness reduced to about 2000 kg/mm2 after heating up to 600 - C. On the other hand, TiAlN/TiN multilayers retained hardness as high as 2500 kg/mm2 even after heating up to 700 -C.

    Item Type: Journal Article
    Additional Information: Copyright belongs to Elsevier Science Ltd.,
    Uncontrolled Keywords: Sputtering;Multilayers;Hard coatings;Hardness;Titanium nitride;Niobium nitride
    Subjects: CHEMISTRY AND MATERIALS > Composite Materials
    CHEMISTRY AND MATERIALS > Chemistry and Materials (General)
    Division/Department: Surface Engineering Division, Surface Engineering Division, Materials Science Division, Other, Other
    Depositing User: Mr. N A
    Date Deposited: 13 Jun 2006
    Last Modified: 03 May 2012 10:31
    URI: http://nal-ir.nal.res.in/id/eprint/1367

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