Development of superhard nanocomposite coatings by unbalanced magnetron sputtering process

Deepthi, B (2005) Development of superhard nanocomposite coatings by unbalanced magnetron sputtering process. Technical Report. National Aerospace Laboratories, Bangalore.

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Abstract

This project involves the deposition of superhard nanocomposite coatings of TiN/Si3N4 using unbalanced magnetron sputtering system equipped with ion beam assisted facility. Unbalanced magnetron sputtering combined with pulsed dc power supply is a powerful tool for the deposition of compound thin films. The coatings were deposited on silicon substrates under high vacuum conditions. TiN/Si3N4 films were deposited at different silicon concentrations and bias voltages. X-ray diffraction results confirmed the nanocrystalline nature of the coatings. NHT measurements showed that the nanocomposite coating had high hardness values. The surface morphology of the TiN/Si3N4 coating was studied using AFM.

Item Type: Monograph (Technical Report)
Uncontrolled Keywords: Sputtering;Unbalanced magnetron;Ion-assisted deposition;Superhard coatings
Subjects: CHEMISTRY AND MATERIALS > Composite Materials
CHEMISTRY AND MATERIALS > Space Processing
Depositing User: Users 10 not found.
Date Deposited: 16 Jan 2009
Last Modified: 24 May 2010 04:10
URI: http://nal-ir.nal.res.in/id/eprint/1129

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